Their statement is that it's too early to assess damage -- but it's enough they need to take a few days to assess the damage itself and impact on production. Also enough that it hit the share price. So, clearly not trivial.

"At this point it is too early to make any statement on the damage or whether the incident will have any impact on the output plan for this year. It will take a few days to conduct a thorough investigation and make a full assessment. "

https://www.asml.com/en/news/press-releases/2022/fire-incide...