From 1991, U.S. Environmental Protection Agency, https://www.epa.gov/sites/default/files/2014-08/documents/hu...
> Recent studies by the Environmental Protection Agency (EPA) and the Consumer Product Safety Commission (CPSC) have shown that ultrasonic and impeller (or "cool mist") humidifiers can disperse materials, such as microorganisms and minerals, from their water tanks into indoor air ... Breathing mist containing these pollutants has been implicated as causing a certain type of inflammation of the lungs. The Federal government has not concluded that the dispersal of minerals by home humidifiers poses a serious health risk. Nevertheless, using water with lower mineral content will reduce exposures to these materials.
Since 30 years have passed since the above statement, perhaps there have been more studies on the topic?