The fact that $6 Billion dollars is a fraction of their profit suggests the United States could just regulate that they and other large US semiconductor firms must produce more chips locally. No need to subsidize.
Or just put taxes on foreign dumping/oversubsidized products. Development grants are good things but these huge companies don’t need them, have plenty of resources to build capacity and new products. We should be funding new competition and science not playing subsidizing games with our biggest companies.