ASML can only build so many machines... IIRC, there is also a loop here because ASML needs advanced chips to make those chipmaking machines.
A 300mm wafer holds 150ish chips, and TSMC makes 13 million wafers a year. Or roughly 2 trillion chips per year.
Now let's say TSMC expands to 2.2 trillion chips/year with a new fab.
If there is no customer for the 200 billion chips / year, you need to keep building newer and newer warehouses constantly. That's just not a number that can be solved with one or two warehouses.
The extreme scenario you define is a fantasy.
They demand staggering amount of power, purest water, liquid H, liquid He.
And if one of those are missing, they will refuse to work. So you better have backup.
In the end, the cost of the ASML machine won't be that high.
Edit: apparently, TSMC alone is responsible for nearly 5% of the entire energy consumption of Taiwan. Holy. https://english.cw.com.tw/article/article.action?id=2766