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ASML may rely on ITAR / dual use parts they enables export control by the US. Or, the US is simply applying a diplomatic squeeze on the Netherlands.

Last time I checked the lasers come from California, from a company that ASML ended up buying.

Cymer (acquired by ASML) is the company providing the 13 nm light sources for the EUV machines of ASML.

The original EUV research was done in US government labs.