Apparently the machines are pretty hard to replicate, the company (ASML) has had to deal with a couple of corporate espionage cases in the past[0].
[0]: https://nos.nl/artikel/2280228-wat-heeft-de-chinese-overheid... (in Dutch)
[0]: https://nos.nl/artikel/2280228-wat-heeft-de-chinese-overheid... (in Dutch)
Even if you have a masterpiece in your possession to try and copy, you will fail.
fantastic channel that goes in depth on chip industry