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Want to stress how extreme cleanliness have to be. Free halogen ions from the air are enough to mess it up.

That's why early fabs had very unusual placement requirements: not close to chicken farms, agriculture, water, or sewage treatment plants.

Intel famously got seasonal yield losses which they traced to agricultural activities, and seasonal chicken coup cleaning.

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Are they able to clean the air well enough now that it’s not an issue?

It’s not really feasible to separate noble gases out of the atmosphere in a building HVAC system.

Couldn't you just use positive pressure of O2 and nitrogen? Push all other gasses out? Would cost a lot but it is doable.

More recent tools do work that way. The whole "tool line" is flushed with process atmosphere.

Probably the buildings are so big nowadays that it's geometrically impossible to have farms nearby the actual plant.

How much m^3 do you need to grow these structures? Couldn't it be done in a very confined space?

This is how it's done now. Tool lines are flushed with chemically regenerated atmosphere (basically getting LOX + LN2 bottles from air liquide, and mixing them,) or argon, or nitrogen only.

Older, and cheaper fabs still rely on natural atmosphere, and other, less sure tricks to keep halogens out.

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