I recently visited the Berkeley Nanolab. As I recall, the main waste products are either acids that are neutralized before being returned to the city sewer system, or exotic gases that are vented in dilute enough quantities to be safe.
To be clear, my comment isn't a callout; I unironically believe that it's explicitly being addressed. I'd just find a writeup around the subject interesting.
the campus runs its own sewer since 1867. Feeds into East Bay MUD.