If you seriously feel paranoid about being watched then you'll want to own the hardware you're actually passing through. And I assume that any large organizations that demand this level of invisibility (cartels etc...) have essentially done this - likely locating some of those servers behind armed guards that will protect the physical device.
That said, I think it's unlikely that Tor has been majority compromised at this point, but as it fades from the minds of folks and becomes more and more niche the probability will escalate.