Actually, ASML provides lifetime support for their machines. I don't know for the rest.
In my estimation these older parts that "just werk" should be getting inherited and iterated on as a public good.
The idea that means of production should phase into public trust tends to get everyone in a tizzy though. I'd like to see a public "foundry of last resort" that focuses on being able to make anything.
And Japanese almost as a rule have whack a good leasing, and service business, including replacement parts for close to 30 years old equipment.