In my experience you never get what you deserve, you get what you negotiate.

Pick a number to which you will be 100% happy to do the work for and use it as your "must have" number, from there consider perks, bonuses, stock etc as nice extras but not part of the must have.

Start as high as you can because that sets your baseline. From there consider that it is a lot easier to get more $ by changing jobs than by merit raises..

My personal pet-peeve, for some reason companies have a problem increasing the pay of top engineers at a rate equivalent to their productivity. (Something that sales people always get)

And finally... always, always always remember: if it is not on paper, it does not count!