I think we started speaking of nanometers around the 100nm point. Before that we had eg .25, .13 microns cpus. And that is of course where the microcomputer got its name, initially ICs had features of a few microns.

Of course, the angstrom being the size that it is (.1nm), makes it unlikely there ever will be another scale. Whatever is next, it won't be silicon.

I wouldn't shed any tears for the industry if some lawsuits got filed against misleading claims regarding transistor feature sizes. That probably won't happen because feature size isn't a spec requirement for anyone per se, but it would be nice to see on principle.

Go down to picometre. 1000pm, etc.