That being said, serious accidents have happened when employees violated procedures/protocols, failed to lock-out/tag-out, or defeated interlocks inappropriately. You can read about them in the press. For example: https://www.oregonlive.com/silicon-forest/2018/10/intel_sued...
Employees who fail to follow safety protocols rarely keep their jobs, even if there happened to be no injuries.
High voltages, high-power optics, vacuum systems, etc, all exist, too, but the risks associated with chemistry/process-gas accidents are perhaps the greatest.
As a teaser, HF is used throughout the industry -- it is spooky stuff (and awesome at getting things done).
Dimethylmercury able to kill through 2 drops absorbed through a latex glove: https://www.acsh.org/news/2016/06/06/two-drops-of-death-dime...
And of course the amazing series of ‘things I won’t work with’. E.g.: https://blogs.sciencemag.org/pipeline/archives/2014/10/10/th...
I would say that it is an extremely safe occupation, having worked previously at a major semiconductor manufacturing facility for a few years. A lot of the staff virtually never enter the cleanroom. I personally only ever went in there 3-4 times. The automation is nearly absolute, so most of the effort is spent making sure the computers are doing the right thing. Sending humans into the cleanroom is directly in conflict with the objective of realizing low defect rates, because people are walking particulate factories.
https://blogs.sciencemag.org/pipeline/archives/2008/02/26/sa...