I can't even draw less than 50€ on most of them because some banks apparently have a "minimum draw amount" for my card.
(Also, note that 10 PLN is the smallest bill we have, below that we switch to coins - 5, 2 and 1 PLN. Our ATMs don't handle coins.)
[edit] This was in Washington, DC.
That said, it seems like all of the Bank of America and TD Bank ATMs I use in Boston are starting to let you choose the bills you want on screen. Was recently in Montreal and had the same experience there too so I'm guessing that's what ATMs are trending towards.
Higher denominations are so rare that many businesses don't accept them.
Also, ATMs on casino floors in Vegas dispense $100s.
I've noticed a couple of banks in Canada where, if you ask the ATM for $100, it'll ask you if you want a single $100 bill, two $50 bills, or five $20 bills.
(Maybe Atlantic City, too. I can't remember...)
I think they have options for smaller bills, too.