"After all, there aren’t many numbers left between 5 and 0."
Math purists may roll their eyes at this statement and clearly even if you are obsessed with integers you can just switch to picometers, but I wonder if it is time to start counting atoms. The diameter of a silicon atom is about 0.21 nanometers, so a 5nm process is dealing with features only about 20-30 atoms wide.
(edit: found more accurate diameter number)