But based on what I know, modern ICs require exceptional levels of purity of the materials. A single atom can ruin a transistor, and therefore the complete chip.
AFAIK the methods you mentioned aren't sensitive enough to detect individual atoms in barrels of stuff. E.g. ICP-MS detects 1E-15 concentrations, but in absolute numbers, 1E15 molecules is only 1.66e-9 mole, e.g. for iron (55.8g/mole), it translates to 1E+10 defects per kg of stuff. Way too many.