Engineered Band Gap Pushes Graphene Closer to Displacing Silicon
spectrum.ieee.org
spectrum.ieee.org
It probably has a lot to do with appealing to the prejudices of grant committees.
You usually don’t want to expose anything to oxygen especially something that is only a few nanometers thick so even if the base silicon does not oxidize (which afaik it does) once you begin the doping process not to mention laying down the metal layers oxygen is a big no no, the oxide layer that form on say copper coins is thicker than the copper layers in most ICs so I really don’t see oxygen as being viable medium during manufacturing.
Based on this it seems that when Oxygen is used it’s used as a purge gas https://www.globalspec.com/learnmore/materials_chemicals_adh...