I watched the video recommended by awalton, and it's definitely as insane as he says it is. I can't believe a synchrotron would be that much more expensive, considering that a single storage ring can have an arbitrary number of output ports.
A Free Electron Laser EUV source would be a facility on it's own, similar in size to a small powerplant built adjacent to your fab, and multiplexed to a dozen or so EUV wafer scanners, that's quite a different endeavor.