When you're applying for online-only degrees, keep in mind what you're giving up. While the quality of the education may be comparable, much of the value of attending in-person is to build career-lasting relationships with smart, interesting, and trustworthy people. For many of us, sitting directly across from someone else while having a meaningful conversation is still unparalleled by what any communications technology can offer us today.
Of course, everyone has a different situation so an online CS program might actually be the best for you. For master's degrees, I've heard good things about programs at GTech, UIUC, and UCB (UCB is data science only)...not too much in the direction of undergraduate degrees.