The difference between this and most other incubators (at Stanford, Harvard iLab, etc as mentioned below) is that it's very specifically geared towards hard-tech startups that other investors typically shy away from because of the long time to market.

University of Illinois at Urbana-Champaign has iVenture Accelerator program. They have plenty have resources and offers financial support ($2500 per fellow and $10k per startup) and co-working space in the UIUC Research Park.

They don't care if its hard-tech or not. Your company has to be good enough to qualify for their program.

https://business.illinois.edu/iventureaccelerator/

StartX seems closest to what they describe.

I believe Stanford also has funds for even earlier stage / younger teams, as well as domain specific programs like the one at the tomkat center for sustainable energy.

Check out Cyclotron Road at Lawrence Berkeley National Lab - similar mission to support hard tech innovators. Applications open until midnight on Monday, October 31 cyclotronroad.org/apply

Well Harvard iLab is a University-wide incubator that has its own building. They offer advising and limited resource support (e.g., a small lab filled with hardware hacking tools), but no funding as far as I'm aware.

The UC system has a biotech incubator, QB3.

http://qb3.org/about

there's also a cornell-technion joint venture called the "Runway startup postdoc" aimed for new PhDs to transition to being founders: http://tech.cornell.edu/programs/startup-postdocs