Try to dig into the content part: who are the mentors, lecturers, what activities take part. Forget comparing the money, it is mostly for living costs. Think who can take you to next level in 1-3 months time, what help you need.
Agreed, and just like schools a good idea is to apply to as many as you can. If you don't get into the program that you want, you can still have an amazing experience connecting with others and building your company at another incubator.