Of the 95 members of the 1st US Congress, 21 (~22%) of them were members of the 5th US Congress, with the following breakdown:
* 5 senators (~17%) remained senators;
* 9 representatives (~14%) remained representatives; and
* 7 representatives (~11%) became senators.
Notes: John Brown was initially a representative of Virginia, then later became a senator of Kentucky (which was part of Virginia at the time of the 1st US Congress). William Smith (MD; 1st US House), William L. Smith (SC; 1st US House), and William Smith (SC; 5th US House) were all different people.
Method: moderately careful transcription plus grep, perl, sort, uniq, and comm.
EDIT: Thanks for adventured for the correction. I mistranscribed Philip Schuyler's name when copying down the members of the 5th US Congress.
[0] I didn't independently check the lists on Wikipedia[1][2].
[1] https://en.wikipedia.org/wiki/1st_United_States_Congress
[2] https://en.wikipedia.org/wiki/5th_United_States_Congress