On the contrary, this article omits mentioning most of the limits we're running into, probably because the reporter couldn't understand them. Dennard scaling ended almost a decade ago because of leakage. You can still put more transistors on a chip, but the benefit of doing so is going away: it allows you to put more hardware in there, but you can't afford to run it all the time because it overheats (the "dark silicon" problem), so instead of giving you a parallel speedup, you're limited to providing a wider range of alternative hardware resources. Reversible computing was an attempt to solve the power-dissipation problem, but it doesn't help with leakage currents, and it's also essentially unachievable as a practical reduction in dissipation with current technology.
(I think it's a little strange to call light with a wavelength of under 10nm "ultraviolet". It's 40 times more energetic than the single octave we call visible light; that's five or six octaves away. I think it's usually called "X-rays".)
True 3D chip design is older than 2D chip design. Bardeen and Brattain's transistor was a 3D chip. That's why it was impractical for 12 years until the planar fabrication process in 1959. Planar fabrication is not only technically important, but also necessary for our current approaches to cooling, which is getting gradually more crucial.
I agree that we're not even close to the ultimate limits of computation. If your lambda is 10 nm and your wires are 20 nm across, that's still on the order of 200 atoms across, and it's been demonstrated that you could just use one: that's almost 16 Moore doublings, or 32 years. And certainly when we figure out how to do reversible computation and molecular nanotechnology, we can reach that limit. But CMOS and X-ray lithography aren't on a path to do that.
CMOS had a great run, totally dominating electronics from about 1982 to about 2017, pushing every alternative process to the margins with its low cost and the miracle of Dennard scaling: ECL, Josephson junctions, CCDs, DNA computing, vacuum tubes, core, chalcogenide glasses. But now that's over.
But don't forget that electronics started in 1904. Vacuum tubes, planar bipolar transistors, planar bipolar ICs, and planar CMOS ICs have each had their time in the sun. Whatever comes next will be something totally different, maybe as different as vacuum tubes are from planar transistors, and there's no reason to expect Intel or TSMC to be the one to pioneer it, just as Polaroid, Kodak, and Nikon weren't the companies that pioneered semiconductor imaging sensors or flash memory.
I'd be surprised if it happened in the US or Europe. Israel, China, Korea, or Japan, possibly.